产品详情
简单介绍：
STP-iXR2206C Edwards磁悬浮涡轮分子泵其设计理念与 STP-iXA2206/iXA3306 系列相同。新的**性转轴设计提高了抽取性能，这一集成的产品易于安装且占地面积小，可作为应用工具的一体化解决方案。
STP-iXR2206C Edwards磁悬浮涡轮分子泵可提供业内的性能，机载控制装置中包含新的小型电源供给。
详情介绍：
概述
STP-iXR2206 系列磁悬浮涡轮分子泵可提供业内的性能，机载控制装置中包含新的小型电源供给。其设计理念与 STP-iXA2206/iXA3306 系列相同。新的**性转轴设计提高了抽取性能，这一集成的产品易于安装且占地面积小，可作为应用工具的一体化解决方案。
应用
玻璃涂层
太阳能 PVD
工业溅射
特性与优势
泵和控制器之间不需要连接电缆。
消除了传统架装式控制器的安装空间和成本。
紧凑型设计使安装更加方便，占地面积更小。
与 STP-A1603 配套时在 8” TMP 同类产品中抽取速度高。
使高气体流速的功耗降低了 32%。
I/O 远程、RS232C、RS485、STP-Link 是标配端口。
可选配 Profibus 和 DeviceNet。
The STP iXA2206C Maglev turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 10-9 Torr. This integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. The STP iXA2206C can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status and Magnet bearing current.
CORROSION RESISTANT:
This pump has nickel coated rotors and stators and pump internals are suitable for corrosive gas applications. This ensures a high level of resistance to corrosion.
MAGNETIC BEARING TECHNOLOGY:
The rotor is suspended by multi-axis magnetic bearings, so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for maintenance.
VIBRATION FREE:
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peakto- peak vibration level is less than 0.02 μm. This amplitude remains constant throughout the life of the pump and is free from troublesome subharmonics.
OIL FREE:
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in industry and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).
MAINTENANCE FREE:
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.
AUTOMATIC BALANCING SYSTEM (ABS):
ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimises the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.
SAFETY BACKUP BEARINGS:
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation..
The STP iXA2206C can be used for a variety of applications including but not limited to:
STP-iXR2206 系列磁悬浮涡轮分子泵可提供业内的性能，机载控制装置中包含新的小型电源供给。其设计理念与 STP-iXA2206/iXA3306 系列相同。新的**性转轴设计提高了抽取性能，这一集成的产品易于安装且占地面积小，可作为应用工具的一体化解决方案。
应用
玻璃涂层
太阳能 PVD
工业溅射
特性与优势
泵和控制器之间不需要连接电缆。
消除了传统架装式控制器的安装空间和成本。
紧凑型设计使安装更加方便，占地面积更小。
与 STP-A1603 配套时在 8” TMP 同类产品中抽取速度高。
使高气体流速的功耗降低了 32%。
I/O 远程、RS232C、RS485、STP-Link 是标配端口。
可选配 Profibus 和 DeviceNet。
Edwards STP iXA2206C 5-axis Magnetic Bearing Turbo-Molecular Pump, Corrosion Resistant Parts,
ISO250F Inlet, Integrated Controller and built in power supply.
Edwards PN YT810Z010.
ISO250F Inlet, Integrated Controller and built in power supply.
Edwards PN YT810Z010.
The STP iXA2206C Maglev turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 10-9 Torr. This integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. The STP iXA2206C can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status and Magnet bearing current.
CORROSION RESISTANT:
This pump has nickel coated rotors and stators and pump internals are suitable for corrosive gas applications. This ensures a high level of resistance to corrosion.
MAGNETIC BEARING TECHNOLOGY:
The rotor is suspended by multi-axis magnetic bearings, so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for maintenance.
VIBRATION FREE:
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peakto- peak vibration level is less than 0.02 μm. This amplitude remains constant throughout the life of the pump and is free from troublesome subharmonics.
OIL FREE:
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in industry and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).
MAINTENANCE FREE:
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.
AUTOMATIC BALANCING SYSTEM (ABS):
ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimises the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.
SAFETY BACKUP BEARINGS:
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation..
The STP iXA2206C can be used for a variety of applications including but not limited to:
- Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping end station
- MBE
- Diffusion
- Photo resist stripping
- Crystal/epitaxial growth
- Wafer inspection
- Load lock chambers
- Scientific instruments: surface analysis, mass spectrometry, electron microscopy
- High energy physics: beam lines, accelerators
- Radioactive applications: fusion systems, cyclotrons
