英国爱德华真空泵-Edwards 主营:真空泵

STP-iX455 Edwards高真空涡轮分子泵

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  • 产品名称:STP-iX455 Edwards高真空涡轮分子泵
  • 产品型号:STP-iX455
  • 产品展商:Edwards
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简单介绍

STP-iX455 爱德华涡轮分子泵 ISO100K氮气抽速为 450 ls-1 STP-iX455 爱德华涡轮分子泵 ISO100K具有**性磁力轴承和电机驱动系统

产品描述
概述
STP-iX455 涡轮分子泵具有**性磁力轴承和电机驱动系统,与上一代涡轮泵相比将振动降低了 50%。采用集成的控制器,不需要使用传统的安装于机架上的控制器及互连电缆,不需要水冷却。
此泵的氮气抽速为 450 ls-1。STP-iX455 极为适合电子显微镜、度量学、光刻和其他对振动敏感的应用。

应用
金属(铝)、钨和电介质(氧化物)以及多晶硅等离子刻蚀(氯化物、氟化物和溴化物)
电子回旋共振 (ECR) 刻蚀
薄膜沉积 CVD、PECVD、ECRCVD、MOCVD
溅射
离子注入源,射束线泵送端点站
MBE
扩散
光致抗蚀剂脱模
晶体/晶膜生长
晶片检查
负载锁真空腔
科学仪器:表面分析、质谱分析、电子显微镜
高能物理:射束线、加速器

放射线应用:融合系统、回旋


功能和优势
紧凑型设计,包括完全集成的控制器
**性自传感轴承系统
数字化 5 轴控制
与现有涡轮泵相比振动级别降低了 50%
可以配置为运行腐蚀性制程
自动平衡系统 (ABS) 标准
自动减振 (AVR) 标准
列于 UL 中,具有 CE 标记,符合 SEMI® S2

技术数据

入口法兰 ISO100K
抽速
N2 300 ls-1
H2 300 ls-1
压缩比
N2 >108
H2 >1 x 104
极限压力 6.5 x 10-6 Pa
*大工作压力 1.3 x 10-1 Pa
允许的前级压力 67 Pa
额定速度 55000 rpm
启动时间 <6 分钟
固定位置 任何方向
冷却方法 自然冷却(加热和气体泵送时进行水冷却或空气冷却)
润滑油 不需要
前级泵 240 lmin-1
泄露磁通量
轴向方向 <100 m/Gauss
径向方向 <100 m/Gauss
环境温度范围 0 至 40 °C
存储温度范围 -25 至 55 °C
重量 15 kg

Edwards STP-iX455 5-axis Magnetic Bearing Turbo-Molecular Pump, ISO100K, LF100 Inlet with Integrated Controller
Edwards PN PT640Z010. For power requirements use an external 48 VDC power supply.

The STP-iX455 turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 1.3x10-10 Torr (8 in. O.D. conflat inlet). With its multi-axis magnetic bearing system contact between the rotor and the remainder of the pump is completely eliminated, effectively producing an unparalleled level of vibration and heat reduction. No frictional contact in the STP-iX455 also reduces wear and enables it to run virtually maintenance free for years. With an integrated controller eliminates the need for a conventional rack mounted controller. This STP-iX455 turbo pump runs so cool it needs no water for cooling. No need for interconnecting cables but you will need a 48VDC external power supply source not provided. (model with power supply is available on this website).

The STP-iX455 has a built in automatic balancing system (ABS), a key feature of 5-axis magnetic drive technology. Sensors in the pump detect imbalance in the rotor motion and respond by adjusting the bearings magnetic fields to permit the rotor to spin on its own inertial axis, reducing vibration sent to the inlet flange. This function of the STP-iX455 works at all rotational speeds to ensure pump safety. All STP series pumps have dry lubricated radial and axial mechanical bearings as backup safety bearings. In the event of total failure of the magnetic bearings, these mechanical bearings will support the rotor and protect the pump. 

The STP-iX-455 can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status & Magnet bearing current.

The STP-iX455 can be used for a variety of applications including but not limited to:
  • Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
  • Electron cyclotron resonance (ECR) etch
  • Film deposition CVD, PECVD, ECRCVD, MOCVD
  • Sputtering
  • Ion implantation source, beam line pumping end station
  • MBE
  • Diffusion
  • Photo resist stripping
  • Crystal/epitaxial growth
  • Wafer inspection
  • Load lock chambers
  • Scientific instruments: surface analysis, mass spectrometry, electron microscopy
  • High energy physics: beam lines, accelerators
  • Radioactive applications: fusion systems, cyclotrons


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