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STP-iXA3306C 爱德华磁悬浮涡轮分子泵

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  • 产品名称:STP-iXA3306C 爱德华磁悬浮涡轮分子泵
  • 产品型号:STP-iXA3306C
  • 产品展商:Edwards
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简单介绍

STP-iXA3306C 爱德华磁悬浮涡轮分子泵可提供业内**的性能,可将小型电源供给集成到机载控制器内(成熟的 STPiXA3305 系列的*新技术)。 STP-iXA3306C 爱德华磁悬浮涡轮分子泵该泵的高度等于 STP-XA2703/XA3203 的高度,也等于 STP-iXA3305 系列(不带其电源供给 (iPS-1200))的高度。 这一完全集成的产品易于安装且占地面积小,可作为所有应用工具的一体化解决方案。

产品描述
概要
STP-iXA3306 系列磁悬浮涡轮分子泵可提供业内**的性能,可将小型电源供给集成到机载控制器内(成熟的 STPiXA3305 系列的*新技术)。
该泵的高度等于 STP-XA2703/XA3203 的高度,也等于 STP-iXA3305 系列(不带其电源供给 (iPS-1200))的高度。 这一完全集成的产品易于安装且占地面积小,可作为所有应用工具的一体化解决方案。

用途
金属(铝)、钨和电介质(氧化物)以及多晶硅等离子刻蚀(氯化物、氟化物和溴化物)
电子回旋共振 (ECR) 刻蚀
薄膜沉积 CVD、PECVD、ECRCVD、MOCVD
溅射
离子注入源,射束线泵送和站

特性与优势
紧凑型设计,包括完全集成的控制器
**性自传感磁力轴承系统
数字化 5 轴控制
与现有涡轮泵相比振动级别降低了 50%
可以配置为运行腐蚀性制程

技术数据

入口法兰尺寸 ISO250F / VG250 / ICF305
前级抽气口尺寸 KF40
抽速 N2 2650 ls-1
抽速 Ar 2300 ls-1
压缩比 N2/H2 >108 / 2 x 103
极限压力 10-7 Pa (10-9 Torr)
允许的前级压力 266 Pa (2 Torr)
*大气流 N2 *(仅水冷) 4000 sccm

(6.76 Pam3s-1)
*大气流 Ar *(仅水冷) 2100 sccm

(3.55 Pam3s-1)
额定速度 27700 rpm
启动时间 <10 分钟
固定位置 任何方向
输入电压 200-240 V
*大输入功率(不带 TMS) 1500 VA
*大输入功率(带 TMS) 1800 VA
重量 80 kg

* *大气流适用于在 25 ºC 以下的水冷却温度下连续泵送 N2  或 Ar 气体,并且使用前级泵(10,000 l/min 尺寸)的情况。 它会随条件变化而变化。



Edwards STP iXA3306C 5-axis Magnetic Bearing Turbo-Molecular Pump, Corrosion Resistant Parts.
ISO250F Inlet, Integrated Controller and built in power supply.

Edwards PN YT820Z020.

The STP iXA3306C Maglev turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 10-9 Torr. This integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. The STP iXA3306C can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status and Magnet bearing current.

CORROSION RESISTANT:
This pump has nickel coated rotors and stators and pump internals are suitable for corrosive gas applications. This ensures a high level of resistance to corrosion.

MAGNETIC BEARING TECHNOLOGY:
The rotor is suspended by multi-axis magnetic bearings, so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for maintenance.

VIBRATION FREE:
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peakto- peak vibration level is less than 0.02 μm. This amplitude remains constant throughout the life of the pump and is free from troublesome subharmonics.

OIL FREE:
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in industry and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).

MAINTENANCE FREE:
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.

AUTOMATIC BALANCING SYSTEM (ABS):
ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimises the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.

SAFETY BACKUP BEARINGS:
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation..

The STP iXA3306C can be used for a variety of applications including but not limited to:
  • Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
  • Electron cyclotron resonance (ECR) etch
  • Film deposition CVD, PECVD, ECRCVD, MOCVD
  • Sputtering
  • Ion implantation source, beam line pumping end station
  • MBE
  • Diffusion
  • Photo resist stripping
  • Crystal/epitaxial growth
  • Wafer inspection
  • Load lock chambers
  • Scientific instruments: surface analysis, mass spectrometry, electron microscopy
  • High energy physics: beam lines, accelerators
  • Radioactive applications: fusion systems, cyclotrons


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