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STPH451C Edwards涡轮分子泵

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  • 产品名称:STPH451C Edwards涡轮分子泵
  • 产品型号:STPH451C
  • 产品展商:Edwards
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简单介绍

STPH451C Edwards涡轮分子泵这种泵经过实践检验的可靠性和上等的性能可以实现*大的制程灵活性。STPH451C 已经由半导体和磁介质行业的大型设备制造商投入使用,并得到了认可。 STPH451C Edwards涡轮分子泵Edwards 的高性能 STPH451C 涡轮分子泵是为*严苛的半导体应用而设计的。

产品描述
概述
Edwards 的高性能 STPH451C 涡轮分子泵是为*严苛的半导体应用而设计的。这种泵经过实践检验的可靠性和上等的性能可以实现*大的制程灵活性。STPH451C 已经由半导体和磁介质行业的大型设备制造商投入使用,并得到了认可。

应用
金属(铝)、钨和电介质(氧化物)以及多晶硅等离子刻蚀(氯化物、氟化物和溴化物)
电子回旋共振 (ECR) 刻蚀
薄膜沉积 CVD、PECVD、ECRCVD、MOCVD
溅射
离子注入源,射束线泵送端点站
MBE
扩散
光致抗蚀剂脱模
晶体/晶膜生长
晶片检查
负载锁真空腔
科学仪器:表面分析、质谱分析、电子显微镜
高能物理:射束线、加速器
放射线应用:融合系统、回旋

功能和优势
先进的转子技术  
更高的气体吞吐量
*大的制程灵活性
无油
低振动
高度可靠
免维护
可用于严苛制程
使用寿命延长
先进的控制器设计  
自动调整
自行诊断功能
直流电机驱动
无电池运行
紧凑型设计  
占地面积小
半机架控制器
5 轴磁悬浮系统  
无污染
少维护

任意方向操作


技术数据

入口法兰 ISO160K
出口 KF40
吹扫口 KF10
水冷却接头 PT1/4
抽速
  N2 450 ls-1
  H2 300 ls-1
压缩比
  N2 >108
  H2 103
加热时的极限压力 10-7 Pa

(10-9 Torr)
*大连续出口压力 660 Pa

(5 Torr)
*大氮气吞吐量 2500 sccm
额定速度 48000 rpm
启动时间 4 分钟
*高入口法兰温度 120 °C
输入电压 100 至 120 (± 10) V 交流或

200 至 240 (± 10) V 交流
功耗 0.6 kVA
泵重量 15 kg
控制器重量 9 kg

Edwards STP-451 3 Axis Magnetic Bearing Ultra High Turbomolecular Pump, 480 l/s Pumping Speed, DN160CF CF 8 in. 
Pump Only NO Accessories. Edwards Part Number B74841010

This listing is for the new Edwards STP-451 3 Axis Magnetic Bearing Ultra High Turbomolecular Pump. To be used with the Edwards SCU-350 Control Unit, pumping speed of 480 liters per second (l/s) of nitrogen, DN160CF CF 8 in. inlet flange, ISO KF-25 exhaust foreline flange, and KF-10 purge port with the corrosion model. A basic pump system would require a Edwards STP-451 pump, a SCU-350 controller, a water cooling accessory and a suitable backing roughing pump. The Edwards STP-451 turbomolecular pump offers field proven reliability for use in electron miscroscopes, scientific instruments and semiconductor applications.
The STP-451 is a series of magnetically-levitated turbomolecular pumps. The STP pump is configured so that rotor blade and the stator blade are aligned alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by the high speed rotation of the rotor. The Rotor blade is supported by the magnetic bearing without mechanical contact. Therefore the STP pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings. The magnetic bearing consists of 3 pairs of active magnetic bearings. The rotor is supported in the radial direction by 2 pairs of radial direction active magnetic bearings that consist of radial sensor and radial electromagnet. A pair of axial direction active magnetic bearings consists of axial sensor and axial electromagnet to support the rotor in the axial direction. Because the rotor is thus supported without mechanical contact, it can rotate with very low vibration.
There is less heat generated from magnetic bearings because there is no friction. Therefore the STP pump requires no cooling. However, the STP pump requires water cooling or air cooling during baking, gas pumping or any process. Taking into consideration a breakage of magnetic bearings, touch down bearings and coated with solid lubrication have been installed. They do not contact the rotor during the rated operation. A radial sensor, an axial sensor, a rotational speed sensor and a temperature sensor always monitor the magnetic bearing as well as the rotor. If an abnormality/error occurs, the rotor will stop. 
To ensure a high level of resistance to corrosion, the corrosion resistant models STP (C) have nickel coated rotors/stators and pump inter­nals suitable for ion implantation and plasma etching. These corrosion resistant pumps have a KF10 nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases minimizing their damage to the pumps motor and sensor coils. All accessories for this pump are available on this website or call 505-872-0037 for details. For complete specs, see graphic below or download the STP manual.pdf in AVAILABLE DOWNLOADS below.


ITEM DESCRIPTION PART NO.
SCU-350 Controller, Works with STP Pumps: 301, 451, L301, L451 Series YT21Z0Z01
Connection Cable 3 meters PS CS B70700010
Connection Cable 5 Meters PS CS B70700000
Connection Cable 10 Meters PS CS B70700130
Type B Power Cable 3 Meters Ring Terminal B70700090
Type B Power Cable 5 meters Ring Terminal Angle B70700040
Type B Power Cable 10 meters Ring Terminal PT21Y0A00
STP Vibration Isolator ISO-100 B58046000
STP Vibration Isolator ISO-160 B58049000
P021 Damper ICF152 B74834010
P001 Damper ICF203 B70652040
P021 Cooling Fan 100 VAC w/1 Meter Cable (P021/P039) YT01BA500
P021 Cooling Fan 115 VAC w/1 Meter Cable YT011A003
P021 Cooling Fan 200 VAC w/1 Meter Cable (P021/P039) YT011A000
Water Cooling Unit RC1/4 Hose YT21CA001


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