产品
- RV系列双级旋片泵
- E2M系列双级旋片泵
- nES系列单级旋片泵
- ES系列单级旋片泵
- nXDS系列干式涡旋泵
- nXLi系列干式真空泵
- EDC系列爪式真空泵
- EOSi系列喷油螺杆泵
- EH系列罗茨真空泵
- EDS系列干式螺杆泵
- GXS系列干式螺杆泵
- GV系列爪式真空泵
- T-Station涡轮分子泵小车
- STP系列涡轮分子泵
- Stokes滑阀泵
- Stokes 6罗茨泵
- D-LAB系列隔膜真空泵
- nEXPT系列分子泵站
- nEXT系列涡轮分子泵
- EDP系列化工爪式干泵
- CXS系列化工螺杆真空泵
- CDX系列化工螺杆真空泵
- HT系列油蒸汽扩散泵
- iH系列半导体真空干泵
- iXH系列半导体真空泵
- iXL系列半导体真空干泵
- EPX系列半导体真空干泵
- GX系列半导体干式泵
产品详情
简单介绍:
Edwards iTIM E73 & Al & T1 & Gate Valve Control for iH pumps. 控制器
Edwards iTIM E73 & Al & T1 & Gate Valve Control for iH pumps. 控制器
详情介绍:
PN D37420000
An iTIM may be used to provide control and monitoring of the IH pump by your Process Tool, using a parallel digital interface. The iTIM has a number of advanced features.
• Digital connections for up to 3 different types of tool interface on each iTIM.
• Convenient mounting on the rear of the pump, rapid two point fixing.
• Configurable connectivity to enable AUC functionality to be readily customised.
• Gate valve control is included in this module as standard.
• The iTIM has a set point store, which allows pump set points relating to a particular process or recipe to be saved. These set points are automatically to be loaded into pump on power up, including new pumps when one is replaced.
Where these modules already exist they may be utilised to provide control and monitoring of the pump by your Process Tool or other control equipment. For example a pump may be upgraded from an iH to an iHs without changing the interface module. However the iTIM provides improved performance over the iM modules, for example full AUC functionality is only available using the iTIM.
• Digital connections for up to 3 different types of tool interface on each iTIM.
• Convenient mounting on the rear of the pump, rapid two point fixing.
• Configurable connectivity to enable AUC functionality to be readily customised.
• Gate valve control is included in this module as standard.
• The iTIM has a set point store, which allows pump set points relating to a particular process or recipe to be saved. These set points are automatically to be loaded into pump on power up, including new pumps when one is replaced.
Where these modules already exist they may be utilised to provide control and monitoring of the pump by your Process Tool or other control equipment. For example a pump may be upgraded from an iH to an iHs without changing the interface module. However the iTIM provides improved performance over the iM modules, for example full AUC functionality is only available using the iTIM.